Description
1.Technical Date
Acceptance Method:
- Using 99.999% inert gas to replace the gas until the degree of 500ppm, start the purification system, then the water and the oxygen content is less than 1ppm.
- When the water and the oxygen content is less than 1ppm, stop the purification system, the increasing scope is less than 100ppm/h.
2.Configuration Sheet
I. Model:
II.Technical Specification sheet:
